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ULVAC Launches Revolutionary PZT Piezoelectric Thin-film Process Technology and HVM Solution for MEMS Sensors/Actuators

  • Written by ACN Newswire
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Sputtering system model SME-200
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Overhead view of the 8-chamber configuration (7 process chambers and a load-lock chamber)
Enabling Reliable, High-quality Film Production for Next Generation Devices

Chigasaki, Japan, Aug 16, 2019 - (JCN Newswire) - ULVAC, Inc. today announced the successful launch of PZT piezoelectric thin-film sputtering...

Read more: ULVAC Launches Revolutionary PZT Piezoelectric Thin-film Process Technology and HVM Solution for...