ULVAC Launches Revolutionary PZT Piezoelectric Thin-film Process Technology and HVM Solution for MEMS Sensors/Actuators
- Written by ACN Newswire
 |
Sputtering system model SME-200 |
 |
Overhead view of the 8-chamber configuration
(7 process chambers and a load-lock chamber) |
Chigasaki, Japan, Aug 16, 2019 - (JCN Newswire) - ULVAC, Inc. today announced the successful launch of PZT piezoelectric thin-film sputtering...